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micro sf6 Regeneration in FRANCE

micro sf6 Regeneration in FRANCE

(SF6) SULFUR HEXAFLUORIDE Electronic Grade | SolvaySulfur Hexafluoride (SF6) is more and more used for the manufacturing of semiconductor devices such as IC (integrated circuits), flat panels, photovoltaic panels and MEMS (Micro-Electro-Mechanical-Systems). SF6 is applied in the above process as an etching gas. Due to the density and large molecule size, SF6 is a prefered etching gas in flat panel and MEMS production processes.

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